Date: 04/12/2020

Plasma-Therm acquired OEM Group's PVD, RTP and Etch biz

Plasma-process semiconductor equipment maker Plasma-Therm has acquired OEM Group’s dry process equipment business.

All original OEM licenses and IP rights for SFI Endeavor, AG Heatpulse, MRC Eclipse, and Tegal brand equipment of OEM Group to be owned by plasma-Therm. Spare parts, upgrades and any such services to be continued for the existing customers by plasma-Therm. Plasma-Therm also to offer new and refurbished tools to the wider market.

“The acquisition allows Plasma-Therm’s award-winning customer service teams to support the large and global install base,” said Abdul Lateef, CEO of Plasma-Therm. “Additionally, PVD and RTP technologies align perfectly with our etch and deposition products and process solutions, which will further support the manufacturing and R&D needs and requirements of our customers.”

Michael Correra, CEO of OEM Group, said, “We are delighted to have had these outstanding products acquired by Plasma-Therm, ensuring a strong path to market for our newly developed Endeavor M series PVD platform, and the continued availability and support of the MRC Eclipse, AG Heatpulse, and Tegal products. This acquisition allows OEM Group to strategically focus on our wet chemical process and ion implant technologies.”