Date: 30/05/2012

Orders placed for 14 NSX Inspection Systems, says Rudolph Technologies

Rudolph Technologies, Inc. has announced that an outsourced semiconductor assembly and test (OSAT) company has placed orders for 14 NSX Series 320 inspection systems. The NSX Systems, scheduled for Q2 2012 installation, will be used for inspection in multiple steps during wafer-level chip-scale packaging (WLCSP) processes.

Nathan Little, vice president and general manager of Rudolph's Inspection business, stated, "As confirmed by our strong order book for this new tool, packaging and test houses want to take advantage of the latest-generation inspection equipment to maximize throughput and productivity. The NSX 320 System performs defect inspection, 2D bump metrology and acquires on-the-fly defect images for maximum productivity and flexibility. In addition, WLCSP requires flexibility for handling substrates in a variety of formats while collecting detailed defect and 2D metrology information during the inspection process; the NSX 320 System incorporates whole wafer and film frame handling solutions to address this requirement."

The NSX 320 System provides defect inspection for next-generation packaging processes at full-production throughput. Automatic recipe sharing between modules, smart wafer scheduling and in-use recipe editing make it an efficient and productive inspection tool.

For more information www.rudolphtech.com