Date: 14/10/2011

Epistar adopts KLA-Tencor's Candela substrate and epitaxy (epi) wafer inspection system

KLA-Tencor Corporation has announced that Taiwan-based Epistar has adopted KLA-Tencor's Candela substrate and epitaxy (epi) wafer inspection system.

According to an Epistar spokesperson, "Adoption of KLA-Tencor's Candela inspection has provided Epistar with improved sapphire quality control and MOCVD process control."

"The Candela system allows LED manufacturers to conduct root cause analysis to speed process development, quickly fine tune production processes to minimize process excursions, and ultimately achieve higher yield per wafer," said Jeff Donnelly, group vice president, Growth and Emerging Markets (GEM) Group at KLA-Tencor. "We are pleased to add Epistar to the growing list of Candela adopters."