Date: 13/10/2011

Dark-field detection of defects on unpatterned semiconductor wafers

Altatech Semiconductor S.A. has introduced its new AltaSight DarkView product to incorporate dark-field detection of defects on unpatterned semiconductor wafers.

AltaSight DarkView performs simultaneous inspection across the frontsides, backsides and edges of bare substrates ranging in size from 100 mm to 450 mm. Applications include quality control of new silicon from wafer suppliers, inspection of engineered silicon-on-insulator (SOI) or epitaxial substrates, and detecting defects on the backsides of in-process patterned wafers.

"With the combined accuracy, productivity and flexibility of our new system, Altatech is continuing to stake out its position as a major player in the substrate-inspection market for semiconductors and LEDs," said Jean-Luc Delcarri, president of Altatech Semiconductor.