Date: 04/09/2023

Semiconductor wafer handling equipments for your fab

Semiconductor wafers are sensitive even to extremely small particles. Semiconductor wafers are also sensitive to physical touches. So there's a need of safe wafer handling tools to inspect, process, test and many such manfacturing and testing steps.

There are exclusive products available from global vendors to handle silicon and other wafers. Solvay, a material expert offers wafer handling materials such as KetaSpire PEEK for wafer cassettes, jars and other internal parts for wafer handling equipment., Udel PSU for wafer carrier housings. Flame retardancy and the ability to pass FM approvals are an additional benefit. And Hyflon Perfluoropolymers is good for wafer carriers for wet cleaning processes and other high stress wafer handling applications.

To learn more about this visit: https://www.solvay.com/en/solutions-market/electronics/semiconductors/wafer-handling


Another company called Core Flow, specialising advancing handling and conveying solution, offers noncontact wafer handling solution where it uses counteracting pressure and vacuum forces to keep the wafer flying at a precise height of about 30 microns, so that both the front-end and back-end of wafer is not touched physically.



Image Source: Core Flow

Core Flow uses its self-adjusting smart nozzles controlled vacuum systems sense the bending in the wafer. Its solutions can handle all types of wafers including ultra-thin, perforated, compound, glass, bare and polished warped semiconductor wafers.

More details are available at https://www.coreflow.com/en/solutions/semiconductor-industry

The electronics engineering services leader, Jabil Circuits is also into this business offering wafer handling automation covering basic wafer handling application or customise solution. Company says they offer turnkey Equipment Front End Module (EFEM) or a fully custom wafer handling solution. WaferMate 300 and WaferMate 200 wafer handling automation platforms from Jabil Circuits are highly-configurable.

Jabil offers Non-Contact Bernoulli, vacuum, Dual Wrist End Effectors and edge grip wafer aligners supporting wafers such as Thin Wafers (down to 50µm thickness), Thick Wafers, Warped Wafers, Bonded Wafers, Trenched Wafers, Glass Wafers, Reticles & Photomasks in the sizes of 100mm to 450mm.

Available System Options include:

Clean Air Fan Filter Unit (FFU) for up to ISO2 cleanliness
Integrated Ionizers for ESD sensitive wafers
Optical Character Recognition (OCR) Reader for alphanumeric scribes, barcodes, and Data Matrix Codes (DMC)
Wafer Flipping Modules
SECS/GEM Communication with facility host network



Image Source: Jabil
To know more on this visit:

https://www.jabil.com/services/precision-automation/semiconductor-wafer-handling.html

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