Date: 10/06/2012

Gas flow sensor module from MEMSIC based on monolithic thermal technology

MEMSIC Inc has announced the availability of the MFA1100R gas flow sensor module, the first member of its new product line addressing the gas flow market.

The sensor module is based on MEMSIC's monolithic thermal technology that uses a precise differential temperature measurement to determine flow rate. There are no moving parts in the system that offers advantages such as high dynamic range, better reliability, small size, low power consumption and fast response time over other sensing technologies.

Features:
1. The sensing element is integrated in a monolithic CMOS process together with on-chip signal processing and embedded software
2. Operates over a flow range of 0 to 100SLM
3. Startup rate: 0.2 SLM
4. Operates from 2.7 to 5.5 V
5. Turndown ratio: >500:1
6. Accuracy: +/-1.5%
7. Repeatability and hysteresis: +/- 1.0%
8. Response time: 100 ms
9. Compatible with a wide range of gasses
10. Power dissipation: 3.0 mW (under continuous operation)
11. Temperature range: -20 to + 60 degree C
12. RoHS compliant

John Newton, MEMSIC's vice president of marketing, said, "Our MFA1100R Thermal Gas Flow Module uses the identical proprietary thermal MEMS technology used in our thermal accelerometer, of which we have shipped hundreds of millions of parts into a variety of applications, including the highly demanding automotive sector. We have proven the reliability and robustness of the MFA1100R through extensive field trials and are pleased that the device is already gaining significant traction in the residential gas meter market."

"We believe the superior reliability, performance and cost of this technology compared with traditional mechanical devices will be disruptive, driving its adoption into a broad range of industrial, medical, and residential flow applications. The product line's modular design can be adapted to a wide range of mechanical packages, while additional functionality can be easily added due to the standard CMOS IC technology."

The MFA1100R design is a full electronic MEMS gas flow sensor module that is easier to integrate into either a wired or a wireless system.

The sensor is available in sample quantities and the price is $199 at 10 unit quantities.